作者单位
摘要
华东师范大学 精密光谱科学与技术国家重点实验室,上海 200241
为了制备高质量表面周期结构,利用法布里-珀罗腔对飞秒激光进行时域整形,输出子脉冲间隔在1~300 ps内灵活可调的飞秒激光脉冲串,在硅表面诱导亚波长周期条纹。实验结果显示,利用飞秒激光脉冲串诱导得到的亚波长周期条纹明显优于原始高斯光诱导的亚波长周期条纹。利用子脉冲间隔为100 ps的脉冲串诱导的亚波长条纹最佳,条纹周期为1 008 nm,结构取向角为2.8°,边缘粗糙度为3.9 nm,可达到光刻工艺的标准。
激光加工 激光诱导表面周期结构 亚波长周期条纹 法布里-珀罗腔 飞秒激光脉冲串  Laser processing Laser induced periodic surface structures Near-subwavelength ripples Fabry-Perot cavity Femtosecond laser pulse train Si 
光子学报
2023, 52(7): 0752301
作者单位
摘要
光子学报
2023, 52(7): 0752300
Author Affiliations
Abstract
1 State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200062, China
2 Huawei Technologies Co, Ltd., Bantian Longgang District, Shenzhen 518129, China
3 Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
This paper reports the fabrication of regular large-area laser-induced periodic surface structures (LIPSSs) in indium tin oxide (ITO) films via femtosecond laser direct writing focused by a cylindrical lens. The regular LIPSSs exhibited good properties as nanowires, with a resistivity almost equal to that of the initial ITO film. By changing the laser fluence, the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of ±10%. Furthermore, the average transmittance of the ITO films with regular LIPSSs in the range of 1200–2000 nm was improved from 21% to 60%. The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices—particularly in the near-infrared band.
transparent nanowires periodic surface nanostructures femtosecond laser direct writing ITO film anisotropic electrical conductivity 
Opto-Electronic Science
2023, 2(1): 220002
Author Affiliations
Abstract
1 State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
2 Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
3 Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University, Jinan 250358, China
Femtosecond laser ablation (FLA) has been playing a prominent role in precision fabrication of material because of its circumvention of thermal effect and extremely high spatial resolution. Molecular dynamics modeling, as a powerful tool to study the mechanism of femtosecond laser ablation, still lacks the connection between its simulation results and experimental observations at present. Here we combine a single-shot chirped spectral mapping ultrafast photography (CSMUP) technique in experiment and a three-dimensional two-temperature model-based molecular dynamics (3D TTM-MD) method in theory to jointly investigate the FLA process of bulky gold. Our experimental and simulated results show quite high consistency in time-resolved morphologic dynamics. According to the highly accurate simulations, the FLA process of gold at the high laser fluence is dominated by the phase explosion, which shows drastic vaporized cluster eruption and pressure dynamics, while the FLA process at the low laser fluence mainly results from the photomechanical spallation, which shows moderate temperature and pressure dynamics. This study reveals the ultrafast dynamics of gold with different ablation schemes, which has a guiding significance for the applications of FLA on various kinds of materials.
Ultrafast Science
2022, 2(1): 9754131
Author Affiliations
Abstract
1 State Key Laboratory of Precision Spectroscopy, School of Physics and Materials Science, East China Normal University, Shanghai 200062, China
2 Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
3 State Key Laboratory of Optical Instrumentation, Zhejiang University, Hangzhou 310027, China
Over the past two decades, femtosecond laser-induced periodic structures (femtosecond-LIPSs) have become ubiquitous in a variety of materials, including metals, semiconductors, dielectrics, and polymers. Femtosecond-LIPSs have become a useful laser processing method, with broad prospects in adjusting material properties such as structural color, data storage, light absorption, and luminescence. This review discusses the formation mechanism of LIPSs, specifically the LIPS formation processes based on the pump-probe imaging method. The pulse shaping of a femtosecond laser in terms of the time/frequency, polarization, and spatial distribution is an efficient method for fabricating high-quality LIPSs. Various LIPS applications are also briefly introduced. The last part of this paper discusses the LIPS formation mechanism, as well as the high-efficiency and high-quality processing of LIPSs using shaped ultrafast lasers and their applications.
laser-induced periodic structures (LIPSs) formation mechanisms femtosecond pulse shaping pump-probe imaging structural color birefringent effects optical absorption photoluminescence 
Opto-Electronic Science
2022, 1(6): 220005
Author Affiliations
Abstract
1 State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
2 Zhejiang Lab, Hangzhou 311100, China
3 State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
4 CAS Center for Excellence in Ultra-Intense Laser Science, Chinese Academy of Sciences, Shanghai 201800, China
Printing stable color with a lithography-free and environment-friendly technique is in high demand for applications. We report a facile strategy of ultrafast laser direct writing (ULDW) to produce large-scale embedded structural colors inside transparent solids. The diffraction effect of gratings enables effective generation of structural colors across the entire visible spectrum. The structural colors inside the fused silica glass have been demonstrated to exhibit excellent thermal stability under high temperature up to 1200°C, which promises that the written information can be stable for long time even with unlimited lifetime at room temperature. The structural colors in the applications of coloring, anti-counterfeiting, and information storage are also demonstrated. Our studies indicate that the presented ULDW allows for fabricating large-scale and high thermal-stability structural colors with prospects of three-dimensional patterning, which will find various applications, especially under harsh conditions such as high temperature.
ultrafast laser direct writing structural color glass information storage 
Chinese Optics Letters
2022, 20(3): 030501
Author Affiliations
Abstract
Inhomogeneity and low efficiency are two important factors that limit the application of laser-induced periodic surface structures (LIPSSs), especially on glass surfaces. In this study, two-beam interference (TBI) of femtosecond lasers was used to produce large-area straight LIPSSs on fused silica using cylindrical lenses. Compared with those produced using a single circular or cylindrical lens, the LIPSSs produced by TBI are much straighter and more regular. Depending on the laser fluence and scanning velocity, LIPSSs with grating-like or spaced LIPSSs are produced on the fused silica surface. Their structural colors are blue, green, and red, and only green and red, respectively. Grating-like LIPSS patterns oriented in different directions are obtained and exhibit bright and vivid colors, indicating potential applications in surface coloring and anti-counterfeiting logos.
Opto-Electronic Advances
2021, 4(12): 200036-1
作者单位
摘要
华东师范大学 精密光谱科学与技术国家重点实验室, 上海200241
为了改善高能流密度飞秒激光的烧蚀质量,使用法布里珀罗腔产生子脉冲间隔在1~3 500 ps内连续可调的飞秒激光脉冲序列,系统探究了单个飞秒高斯脉冲与不同脉冲间隔的脉冲序列在硅上烧蚀的孔型质量。实验结果显示,子脉冲间隔在50~100 ps范围内时,孔边缘的冠状重熔物大大减少,其厚度仅为单个飞秒高斯脉冲的40%,周围基底几乎没有粘连的粉尘或热损伤痕迹,孔型品质因子数值从单个飞秒脉冲的0.52提升至0.89。本文报道的飞秒激光脉冲序列,基于后续子脉冲与喷出物的二次烧蚀原理,子脉冲间隔在50~100 ps范围内时,后续子脉冲能够最大程度的雾化喷出物,从而减少冠状重熔物与高温粉尘污染损伤,烧蚀质量得到改善。
飞秒激光 高能流密度 脉冲序列 法布里珀罗腔  激光烧蚀 加工质量 重熔 粉尘 Femtosecond laser High energy density Pulse train Fabry-Perot cavity Silicon Laser ablation Ablation quality Redeposition Dust 
光子学报
2021, 50(6): 108
作者单位
摘要
1 华东师范大学 精密光谱科学与技术国家重点实验室,上海20024
2 上海电机学院 文理学院,上海01306
利用飞秒激光双光束干涉技术,结合柱透镜线扫描技术,在30 s内制备了面积为10 mm×10 mm的微米-纳米复合结构,极大地提升了激光加工效率。飞秒激光刻蚀后的硅表面包含双光束干涉引起的长周期微米结构,以及飞秒激光诱导的纳米周期结构。微米-纳米复合结构极大地提升了表面粗糙度,在毛细效应的作用下,硅在空气中显示出超亲水性,接触角从40°降为0°。测量烧蚀前后硅表面的X射线光电子能谱,发现激光加工后硅表面的Si-OH和H2O分子的含量分别增加22.3%和13.6%,这进一步增强了硅表面的亲水性。随着激光照射功率的增加以及扫描速度的下降,硅表面接触角逐步下降。本文研究为高效制备大面积超亲水结构提供了新方法,在热传导、生物芯片等领域具有潜在的应用价值。
飞秒激光 双光束干涉  微米-纳米复合结构 超亲水 Femtosecond laser Two-beam interference Silicon Hybrid micro/nanostructures Superhydrophilicity 
光子学报
2021, 50(6): 100
作者单位
摘要
1 华东师范大学 精密光谱科学与技术国家重点实验室, 上海20024
2 深圳市坪山区同心外国语学校,广东深圳518118
基于空间光调制器的飞秒激光时空干涉方法,改变800 nm飞秒激光能流密度和累积脉冲数,在316镜面不锈钢上高效率、高质量地制备了面积为5 mm×5 mm的双尺度的类鲨鱼皮肤微纳米仿生结构,并研究了该结构在不同激光照射条件下的润湿性。在激光能流密度为1.37 J/cm2,累积脉冲数为30~40的条件下,不锈钢表面碳元素含量最多增加了13.22%,润湿性由亲水(接触角88°)转变为超疏水,接触角高达165°。本研究利用灵活、高效的飞秒激光时空干涉加工方法,得到了稳定的超疏水表面,为仿生结构制备提供了新思路。
飞秒激光 时空干涉 不锈钢 鲨鱼皮肤 仿生结构 润湿性 超疏水表面 Femtosecond laser Spatiotemporal interference Stainless steel Shark skin Biomimetic structures Wettability Super-hydrophobic surface 
光子学报
2021, 50(6): 91

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